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Chemical Vapor Deposition (06682G)

Jong-Hee Park




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 | #5457056 in Books |  2001-04-15 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  10.00 x7.00 x1.25l,.0 | File type: PDF | 450 pages

|

This handbook provides guidelines and practical information on the chemical vapor deposition (CVD) process for surface engineering design, product development, and manufacturing. The first of the 14 chapters discuss the basic principles of CVD thermodynamics and kinetics, stresses and mechanical sta



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