[PDF.87he] Electron Beam Testing Technology (Microdevices)

Electron Beam Testing Technology (Microdevices)

[PDF.lc15] Electron Beam Testing Technology (Microdevices)

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 | #6038556 in Books |  1993-01-15 | Ingredients: Example Ingredients | Original language:English | PDF # 1 |  10.00 x1.06 x7.01l,2.49 | File type: PDF | 462 pages

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||0 of 0 people found the following review helpful.| Electron Beam Testing Technology - Book Review|By Sriram Krishnaswami|This book is a very useful explanation of electron beam metrology fundamentals and techniques. It is very useful as a first introduction to the basics of e-beam technology from an SEM/metrology perspective. Topics such as e-beam optics, detectors, secondary electron emission, voltage contrast etc. are prese

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device compl...

You can specify the type of files you want, for your gadget.Electron Beam Testing Technology (Microdevices)   |  From Springer. A good, fresh read, highly recommended.

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